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Aqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide films

Date

2007
Proceedings Paper
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dc.contributor.authorHardy, An
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDouheret, Olivier
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorWitters, Thomas
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorMullens, J
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-16T16:30:31Z
dc.date.available2021-10-16T16:30:31Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12255
dc.source.conference10th International Conference and Exhibition of the European Ceramic Society
dc.source.conferencedate17/06/2007
dc.source.conferencelocationBerlin Germany
dc.title

Aqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide films

dc.typeProceedings paper
dspace.entity.typePublication
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