Publication:
Measurement of nonuniform stresses in semiconductor films by optical methods
Date
| dc.contributor.author | Pinardi, Kuntjoro | |
| dc.contributor.author | Jain, Suresh | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.author | Van Overstraeten, Roger | |
| dc.contributor.author | Willander, M. | |
| dc.contributor.author | Atkinson, A. | |
| dc.date.accessioned | 2021-09-30T09:25:04Z | |
| dc.date.available | 2021-09-30T09:25:04Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2091 | |
| dc.source.conference | Materials Research Society 1997 Fall Meeting : Symposium on Thin Film Stresses and Mechanical Properties; December 1-5, 1997; Bo | |
| dc.source.conferencelocation | ||
| dc.title | Measurement of nonuniform stresses in semiconductor films by optical methods | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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