Publication:

Multi-sensors module in SiGeMEMS technology

Date

2013

Proceedings Paper

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Author(s)

Tilmans, Harrie

;

;

;

Helin, Philippe

;

Erismis, Mehmet Akif

;

Haspeslagh, Luc

;

Op de Beeck, Maaike

;

;

Rochus, Veronique

;

Yazicioglu, Refet Firat

;

Donnay, Stephane

;

Van Hoof, Chris

;

Rottenberg, Xavier

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Acq. date: 2026-06-01