Publication:
Optical proximity correction: pattern generation issues
Date
| dc.contributor.author | Jonckheere, Rik | |
| dc.contributor.author | Ronse, Kurt | |
| dc.contributor.imecauthor | Jonckheere, Rik | |
| dc.contributor.imecauthor | Ronse, Kurt | |
| dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
| dc.date.accessioned | 2021-09-29T13:08:01Z | |
| dc.date.available | 2021-09-29T13:08:01Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/695 | |
| dc.source.conference | Micro and Nano Engineering; 26-29 September 1994; Aix-en-Provence, France. | |
| dc.source.conferencelocation | ||
| dc.title | Optical proximity correction: pattern generation issues | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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