Publication:

Achieving High Ferroelectric Polarization in Ultrathin BaTiO3 Films on Si

Date

2025
Journal article
https://doi.org/10.1002/aelm.202400440
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dc.contributor.authorBagul, Pratik
dc.contributor.authorHan, Han
dc.contributor.authorLagrain, Pieter
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorSerron, Jill
dc.contributor.authorRichard, Olivier
dc.contributor.authorConard, Thierry
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMcMitchell, Sean
dc.contributor.imecauthorBagul, Pratik
dc.contributor.imecauthorHan, Han
dc.contributor.imecauthorLagrain, Pieter
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorSerron, Jill
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorMcMitchell, Sean
dc.contributor.orcidimecBagul, Pratik::0000-0001-6159-1818
dc.contributor.orcidimecHan, Han::0000-0003-2169-8332
dc.contributor.orcidimecLagrain, Pieter::0000-0003-3734-7203
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecSerron, Jill::0000-0002-9101-8139
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecMcMitchell, Sean::0000-0002-9916-0973
dc.date.accessioned2025-05-05T10:17:25Z
dc.date.available2024-11-16T16:49:18Z
dc.date.available2025-05-05T10:17:25Z
dc.date.embargo2024-10-31
dc.date.issued2025
dc.identifier.doi10.1002/aelm.202400440
dc.identifier.issn2199-160X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44785
dc.publisherWILEY
dc.source.beginpageArt. 2400440
dc.source.endpageN/A
dc.source.issue4
dc.source.journalADVANCED ELECTRONIC MATERIALS
dc.source.numberofpages10
dc.source.volume11
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsSILICIDE FORMATION
dc.subject.keywordsPHASE-TRANSITION
dc.subject.keywordsPTSI
dc.subject.keywordsSTRAIN
dc.subject.keywordsOXIDE
dc.subject.keywordsELECTRORESISTANCE
dc.subject.keywordsSTABILITY
dc.subject.keywordsTHICKNESS
dc.subject.keywordsLAYERS
dc.title

Achieving High Ferroelectric Polarization in Ultrathin BaTiO3 Films on Si

dc.typeJournal article
dspace.entity.typePublication
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