Publication:
Transistor strain measurement techniques and their applications
Date
| dc.contributor.author | Kuhn, Markus | |
| dc.contributor.author | Cea, Stephen | |
| dc.contributor.author | Zhang, Jiong | |
| dc.contributor.author | Wormingtong, Matthew | |
| dc.contributor.author | Nuytten, Thomas | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Zuo, Jian-Min | |
| dc.contributor.author | Rouviere, Jean-Luc | |
| dc.contributor.imecauthor | Nuytten, Thomas | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Nuytten, Thomas::0000-0002-5921-6928 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-24T07:11:13Z | |
| dc.date.available | 2021-10-24T07:11:13Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28716 | |
| dc.identifier.url | https://www.crcpress.com/Metrology-and-Diagnostic-Techniques-for-Nanoelectronics/Ma-Seiler/p/book/9789814745086 | |
| dc.source.beginpage | 207 | |
| dc.source.book | Metrology and Diagnostic Techniques for Nanoelectronics | |
| dc.source.endpage | 376 | |
| dc.title | Transistor strain measurement techniques and their applications | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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