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Resolution-linewidth roughness-sensitivity performance tradeoffs for an extreme ultraviolet polymer bound photo-acid generator resist
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1975 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-11
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Metrics
Views
1975 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-11
Citations