Publication:

Nucleation and orientation of sol-gel PZT-films on Pt electronics

Date

1997
Journal article
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dc.contributor.authorWillems, Geert
dc.contributor.authorWouters, Dirk
dc.contributor.authorMaes, Herman
dc.contributor.authorNouwen, R.
dc.contributor.imecauthorWillems, Geert
dc.contributor.orcidimecWillems, Geert::0000-0002-9137-618X
dc.date.accessioned2021-09-30T10:08:29Z
dc.date.available2021-09-30T10:08:29Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2312
dc.source.beginpage19
dc.source.endpage28
dc.source.journalIntegrated Ferroelectrics
dc.source.volume15
dc.title

Nucleation and orientation of sol-gel PZT-films on Pt electronics

dc.typeJournal article
dspace.entity.typePublication
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