Publication:
Recent improvements in the fabrication and performances of AlN based piezoelectric vibration energy harvesters
Date
| dc.contributor.author | Renaud, Michael | |
| dc.contributor.author | Elfrink, Rene | |
| dc.contributor.author | Jambunathan, Madhu | |
| dc.contributor.author | de Nooijer, Christine | |
| dc.contributor.author | Rovers, Madelon | |
| dc.contributor.author | Vullers, Ruud | |
| dc.contributor.author | van Schaijk, Rob | |
| dc.contributor.imecauthor | Elfrink, Rene | |
| dc.contributor.imecauthor | de Nooijer, Christine | |
| dc.date.accessioned | 2021-10-19T18:05:02Z | |
| dc.date.available | 2021-10-19T18:05:02Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19680 | |
| dc.source.conference | PowerMEMS | |
| dc.source.conferencedate | 15/11/2011 | |
| dc.source.conferencelocation | Seoul Korea | |
| dc.title | Recent improvements in the fabrication and performances of AlN based piezoelectric vibration energy harvesters | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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