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Ruthenocene and cyclopentadienyl pyrrolyl ruthenium as precursors for ruthenium atomic layer deposition: a comparative study of dissociation enthalpies

Date

2012
Journal article
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dc.contributor.authorPhung, Quan
dc.contributor.authorVancoillie, Steven
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorPierloot, Christine
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorPierloot, Christine
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.accessioned2021-10-20T14:36:32Z
dc.date.available2021-10-20T14:36:32Z
dc.date.issued2012
dc.identifier.issn1432-881X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21305
dc.source.beginpage1238
dc.source.endpage1247
dc.source.journalTheoretical Chemistry Accounts
dc.source.volume131
dc.title

Ruthenocene and cyclopentadienyl pyrrolyl ruthenium as precursors for ruthenium atomic layer deposition: a comparative study of dissociation enthalpies

dc.typeJournal article
dspace.entity.typePublication
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