Evolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenches

dc.contributor.author	Jiang, Sijia
dc.contributor.author	Merckling, Clement
dc.contributor.author	Guo, Weiming
dc.contributor.author	Waldron, Niamh
dc.contributor.author	Caymax, Matty
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Seefeldt, Marc
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	Merckling, Clement
dc.contributor.imecauthor	Waldron, Niamh
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.imecauthor	Heyns, Marc
dc.contributor.orcidimec	Merckling, Clement::0000-0003-3084-2543
dc.date.accessioned	2021-10-22T02:21:27Z
dc.date.available	2021-10-22T02:21:27Z
dc.date.issued	2014
dc.identifier.issn	0021-8979
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24010
dc.identifier.url	http://scitation.aip.org/content/aip/journal/jap/115/2/10.1063/1.4861416
dc.source.beginpage	23517
dc.source.issue	2
dc.source.journal	Journal of Applied Physics
dc.source.volume	115
dc.title	Evolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenches
dc.type	Journal article
dspace.entity.type	Publication
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