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Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks

Date

2003
Proceedings Paper
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dc.contributor.authorDegraeve, Robin
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorKerber, Andreas
dc.contributor.authorCartier, E.
dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorPantisano, Luigi
dc.contributor.authorBlomme, Pieter
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2021-10-15T04:27:23Z
dc.date.available2021-10-15T04:27:23Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7478
dc.source.beginpage23
dc.source.conferenceProceedings 41st Annual IEEE International Reliability Physics Symposium
dc.source.conferencedate30/03/2003
dc.source.conferencelocationDallas, TX USA
dc.source.endpage28
dc.title

Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks

dc.typeProceedings paper
dspace.entity.typePublication
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