Publication:
Diffusion of active radicals in porous low-k materials
Date
| dc.contributor.author | Arkhincheev, V. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-20T10:02:22Z | |
| dc.date.available | 2021-10-20T10:02:22Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20303 | |
| dc.source.conference | Semicon Russia: EU-RU.NET Workshop | |
| dc.source.conferencedate | 15/05/2012 | |
| dc.source.conferencelocation | Moscow Russia | |
| dc.title | Diffusion of active radicals in porous low-k materials | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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