Publication:
Interfacial reactions and phase stabilization of doped hafnia and higher-k oxides: the added value of GATR-FTIR
Date
| dc.contributor.author | Hardy, An | |
| dc.contributor.author | Adelmann, Christoph | |
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.author | Favia, Paola | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Franquet, Alexis | |
| dc.contributor.author | Van den Rul, Heidi | |
| dc.contributor.author | Van Bael, Marlies | |
| dc.contributor.author | D'Haen, Jan | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | D'Olieslaeger, Marc | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Kittl, Jorge | |
| dc.contributor.author | Detavernier, Christophe | |
| dc.contributor.author | Mullens, Jules | |
| dc.contributor.imecauthor | Hardy, An | |
| dc.contributor.imecauthor | Adelmann, Christoph | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Favia, Paola | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Franquet, Alexis | |
| dc.contributor.imecauthor | Van Bael, Marlies | |
| dc.contributor.imecauthor | D'Haen, Jan | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | D'Olieslaeger, Marc | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
| dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
| dc.contributor.orcidimec | Van Bael, Marlies::0000-0002-5516-7962 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.contributor.orcidimec | Hardy, An::0000-0002-5012-0356 | |
| dc.contributor.orcidimec | D'Olieslaeger, Marc::0000-0001-7951-8037 | |
| dc.date.accessioned | 2021-10-17T22:44:29Z | |
| dc.date.available | 2021-10-17T22:44:29Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15440 | |
| dc.source.conference | MRS Spring Meeting Symposium C: CMOS Gate-Stack Scaling - Materials, Interfaces, and Reliability Implications | |
| dc.source.conferencedate | 14/04/2009 | |
| dc.source.conferencelocation | San Francisco, CA US | |
| dc.title | Interfacial reactions and phase stabilization of doped hafnia and higher-k oxides: the added value of GATR-FTIR | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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