Publication:
Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materials
Date
| dc.contributor.author | El Otell, Ziad | |
| dc.contributor.author | Samara, Vladimir | |
| dc.contributor.author | Zotovich, Alexey | |
| dc.contributor.author | Hansen, Terje | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | El Otell, Ziad | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-22T19:10:57Z | |
| dc.date.available | 2021-10-22T19:10:57Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0022-3727 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25251 | |
| dc.identifier.url | http://iopscience.iop.org/article/10.1088/0022-3727/48/39/395202 | |
| dc.source.beginpage | 395202 | |
| dc.source.issue | 39 | |
| dc.source.journal | Journal of Physics D: Applied Physics | |
| dc.source.volume | 48 | |
| dc.title | Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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