Publication:
Implementation of self-assembly in a 300mm processing environment
Date
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Rincon Delgadillo, Paulina | |
| dc.contributor.author | Nealey, Paul | |
| dc.contributor.author | Younkin, Todd | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.imecauthor | Rincon Delgadillo, Paulina | |
| dc.date.accessioned | 2021-10-20T11:20:53Z | |
| dc.date.available | 2021-10-20T11:20:53Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20755 | |
| dc.source.conference | SPECTARIS User Forum | |
| dc.source.conferencedate | 10/10/2012 | |
| dc.source.conferencelocation | ||
| dc.title | Implementation of self-assembly in a 300mm processing environment | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |