Publication:

Photosensitive polymer reliability for fine pitch RDL applications

Date

2020-06
Proceedings Paper
https://doi.org/10.1109/ECTC32862.2020.00197
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dc.contributor.authorChery, Emmanuel
dc.contributor.authorDuval, Fabrice
dc.contributor.authorStucchi, Michele
dc.contributor.authorSlabbekoorn, John
dc.contributor.authorCroes, Kristof
dc.contributor.authorBeyne, Eric
dc.contributor.imecauthorChery, Emmanuel
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorSlabbekoorn, John
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecChery, Emmanuel::0000-0002-2526-3873
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecDuval, Fabrice::0000-0001-7652-6402
dc.contributor.orcidimecSlabbekoorn, John::0000-0002-6098-8618
dc.contributor.orcidimecStucchi, Michele::0000-0002-7848-0492
dc.date.accessioned2022-03-31T09:37:57Z
dc.date.available2021-11-02T16:04:35Z
dc.date.available2021-11-08T09:51:54Z
dc.date.available2022-03-31T09:37:57Z
dc.date.issued2020-06
dc.identifier.doi10.1109/ECTC32862.2020.00197
dc.identifier.eisbn978-1-7281-6180-8
dc.identifier.isbn978-1-7281-6180-8
dc.identifier.issn0569-5503
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38147
dc.publisherIEEE COMPUTER SOC
dc.source.beginpage1234
dc.source.conference70th IEEE Electronic Components and Technology Conference (ECTC)
dc.source.conferencedateJUN 03-30, 2020
dc.source.conferencelocationVirtual
dc.source.endpage1240
dc.source.journalNA
dc.source.numberofpages7
dc.subject.disciplineMaterials science
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsRESISTANCE
dc.subject.keywordsOXIDATION
dc.subject.keywordsFine pitch RDL
dc.subject.keywordsphotosensitive polymer
dc.subject.keywordsreliability
dc.subject.keywords3D packaging
dc.title

Photosensitive polymer reliability for fine pitch RDL applications

dc.typeProceedings paper
dspace.entity.typePublication
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