Publication:

Diode analysis of silicon substrate quality

Date

1999
Proceedings Paper
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, Cor
dc.contributor.authorCzerwinski, A.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-14T11:39:27Z
dc.date.available2021-10-14T11:39:27Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3832
dc.source.beginpage248
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes
dc.source.conferencedate16/09/1999
dc.source.conferencelocationLeuven Belgium
dc.source.endpage258
dc.title

Diode analysis of silicon substrate quality

dc.typeProceedings paper
dspace.entity.typePublication
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