Publication:

Physical characterization of ultrathin high k dielectrics

Date

2003
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Vandervorst, Wilfried  
;
Brijs, Bert
;
Bender, Hugo  
;
Conard, Thierry  
;
Petry, Jasmine
;
Richard, Olivier  
;
Van Elshocht, Sven  
;
Delabie, Annelies  
;
Caymax, Matty  
;
De Gendt, Stefan  

Journal

Abstract

Description

Statistics

Views

1856 since deposited on 2021-10-15
Acq. date: 2026-09-18

Citations

Statistics

Views

1856 since deposited on 2021-10-15
Acq. date: 2026-09-18

Citations