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Fabrication of high quality Ge virtual substrates by selective epitaxial growth in shallow trench isolated Si (001) trenches
Publication:
Fabrication of high quality Ge virtual substrates by selective epitaxial growth in shallow trench isolated Si (001) trenches
Date
2009
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Gang
;
Loo, Roger
;
Souriau, Laurent
;
Takeuchi, Shotaro
;
De Jaeger, Brice
;
Lee, W
;
Caymax, Matty
;
Lin, Vic
;
Vandervorst, Wilfried
;
Blanpain, Bart
;
Heyns, Marc
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Abstract
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1995
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1995
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations