Publication:

Origin and suppression of junction leakage in germanium-on-silicon structures

Date

2007
Proceedings Paper
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dc.contributor.authorSonde, Sushant
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorSatta, Alessandra
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorNicholas, Gareth
dc.contributor.authorMeuris, Marc
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-16T19:54:38Z
dc.date.available2021-10-16T19:54:38Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12930
dc.source.beginpage31
dc.source.conferenceAdvanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS 3: New Materials, Processes and Equipment
dc.source.conferencedate6/05/2007
dc.source.conferencelocationChicago, IL USA
dc.source.endpage39
dc.title

Origin and suppression of junction leakage in germanium-on-silicon structures

dc.typeProceedings paper
dspace.entity.typePublication
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