Publication:
Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios
Date
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Fodor, Ferenc | |
| dc.contributor.author | Marinissen, Erik Jan | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Fodor, Ferenc | |
| dc.contributor.imecauthor | Marinissen, Erik Jan | |
| dc.contributor.orcidimec | Marinissen, Erik Jan::0000-0002-5058-8303 | |
| dc.date.accessioned | 2022-01-05T11:34:39Z | |
| dc.date.available | 2021-11-02T16:05:16Z | |
| dc.date.available | 2022-01-05T11:34:39Z | |
| dc.date.issued | 2020 | |
| dc.identifier.eisbn | 978-1-7281-4312-5 | |
| dc.identifier.issn | 1530-1877 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38202 | |
| dc.publisher | IEEE | |
| dc.source.conference | 25th IEEE European Test Symposium (ETS) | |
| dc.source.conferencedate | MAY 25-29, 2020 | |
| dc.source.conferencelocation | Tallinn, Estonia | |
| dc.source.journal | na | |
| dc.source.numberofpages | 6 | |
| dc.title | Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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