Publication:
Integrated scatterometry for contact hole monitoring
Date
| dc.contributor.author | Barry, K. | |
| dc.contributor.author | Cheng, Shaunee | |
| dc.contributor.author | Storms, Greet | |
| dc.contributor.author | Baudemprez, Bart | |
| dc.contributor.imecauthor | Baudemprez, Bart | |
| dc.date.accessioned | 2021-10-15T12:40:54Z | |
| dc.date.available | 2021-10-15T12:40:54Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8535 | |
| dc.source.conference | Proceedings 41st Arch Interface Symposium | |
| dc.source.conferencedate | 26/09/2004 | |
| dc.source.conferencelocation | Tempe, AZ USA | |
| dc.title | Integrated scatterometry for contact hole monitoring | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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