Publication:

Massive e-beam metrology and inspection for analysis of EUV stochastic defect

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2584696

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Author(s)

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De Simone, Danilo

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Rincon Delgadillo, Paulina

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Frommhold, Andreas

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Leray, Philippe

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2029 since deposited on 2021-10-31

Acq. date: 2026-04-25