Publication:

Massive e-beam metrology and inspection for analysis of EUV stochastic defect

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2584696
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Author(s)

Kang, Seulki
;
Maruyama, K.
;
Yamazaki, Z.
;
De Simone, Danilo  
;
Rincon Delgadillo, Paulina  
;
Frommhold, Andreas  
;
Lorusso, Gian  
;
Das, Sayantan  
;
Halder, Sandip  
;
Leray, Philippe  

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2028 since deposited on 2021-10-31
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2028 since deposited on 2021-10-31
2last month
Acq. date: 2026-02-26

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