Publication:

Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

Date

2007

Journal article

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Author(s)

;

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Pantisano, Luigi

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Stesmans, Andre

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Conard, Thierry

;

Shamuilia, Sheron

;

Afanasiev, Valeri

;

;

Van Elshocht, Sven

;

;

;

;

;

De Gendt, Stefan

;

De Meyer, Kristin

Journal

Microelectronics Reliability

Metrics

1913 since deposited on 2021-10-16

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Acq. date: 2026-01-08