Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

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Author(s)

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Pantisano, Luigi

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Stesmans, Andre

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Conard, Thierry

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Shamuilia, Sheron

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Afanasiev, Valeri

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Van Elshocht, Sven

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De Gendt, Stefan

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De Meyer, Kristin

Journal

Microelectronics Reliability

Metrics

1910 since deposited on 2021-10-16

Acq. date: 2025-12-08