Publication:
Single nanometer pattern transfer
Date
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Cooke, Mike | |
| dc.contributor.author | Neuber, Christian | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-22T18:50:29Z | |
| dc.date.available | 2021-10-22T18:50:29Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25140 | |
| dc.source.conference | MNE Micro-Nano Engineering Conference / SNM special session | |
| dc.source.conferencedate | 21/09/2015 | |
| dc.source.conferencelocation | Den Haag Netherlands | |
| dc.title | Single nanometer pattern transfer | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |