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A novel method for characterizing resist performance
Publication:
A novel method for characterizing resist performance
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Steenwinckel, David
;
Gronheid, Roel
;
Lammers, J.H.
;
Myers, Alan
;
Van Roey, Frieda
;
Willems, Patrick
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1948
since deposited on 2021-10-16
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Acq. date: 2025-12-11
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Metrics
Views
1948
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2025-12-11
Citations