A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling

Zdru, I.; Nastase, C.; Hess, L. N.; Ciubotaru, Florin; Nicoloiu, A.; Vasilache, D.; Dekkers, M.; Geilen, M.; Ciornei, C.; Boldeiu, G.; Dinescu, A.; Adelmann, Christoph; Weiler, M.; Pirro, P.; Mueller, A.

doi:10.1109/LED.2022.3196101

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A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling

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2022

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https://doi.org/10.1109/LED.2022.3196101

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IEEE ELECTRON DEVICE LETTERS

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1627 since deposited on 2022-09-09

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Acq. date: 2026-04-05

A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling

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