Publication:

High-aspect-ratio ruthenium lnes for buried power rail

Date

2018
Proceedings Paper
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dc.contributor.authorGupta, Anshul
dc.contributor.authorKundu, Shreya
dc.contributor.authorTeugels, Lieve
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHeylen, Nancy
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorCiofi, Ivan
dc.contributor.authorChava, Bharani
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.date.accessioned2021-10-25T19:22:46Z
dc.date.available2021-10-25T19:22:46Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30823
dc.source.beginpage4
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2018
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage6
dc.title

High-aspect-ratio ruthenium lnes for buried power rail

dc.typeProceedings paper
dspace.entity.typePublication
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