Publication:
n+ doping of Ge by P or As implantation and flash-lamp annealing
Date
| dc.contributor.author | Wündisch, C. | |
| dc.contributor.author | Posselt, M. | |
| dc.contributor.author | Anwand, W. | |
| dc.contributor.author | Schmidt, B. | |
| dc.contributor.author | Grötzschel, R. | |
| dc.contributor.author | Mücklich, A. | |
| dc.contributor.author | Skorupa, W. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Satta, Alessandra | |
| dc.contributor.author | Hortenbach, H. | |
| dc.contributor.author | Möller, A. | |
| dc.contributor.author | Pelzing, P. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-17T12:52:27Z | |
| dc.date.available | 2021-10-17T12:52:27Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14799 | |
| dc.source.conference | E-MRS Spring Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices | |
| dc.source.conferencedate | 26/05/2008 | |
| dc.source.conferencelocation | Strasbourg France | |
| dc.title | n+ doping of Ge by P or As implantation and flash-lamp annealing | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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