Publication:

Optical lithography, how far will it get us?

Date

1997
Proceedings Paper
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dc.contributor.authorVan den hove, Luc
dc.contributor.imecauthorVan den hove, Luc
dc.date.accessioned2021-09-30T09:46:00Z
dc.date.available2021-09-30T09:46:00Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2213
dc.source.beginpage163
dc.source.conferenceESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference
dc.source.conferencedate22/09/1997
dc.source.conferencelocationStuttgart Germany
dc.source.endpage169
dc.title

Optical lithography, how far will it get us?

dc.typeProceedings paper
dspace.entity.typePublication
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