Publication:

Scalability of Ni FUSI gate processes: phase and Vt control to 30 nm gate lengths

Date

2005

Proceedings Paper

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Author(s)

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Veloso, Anabela

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Kottantharayil, Anil

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Demeurisse, Caroline

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Kubicek, Stefan

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;

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Richard, Olivier

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Kmieciak, Malgorzata

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Vrancken, Christa

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Chiarella, Thomas

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;

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Biesemans, Serge

Metrics

1940 since deposited on 2021-10-16

Acq. date: 2025-12-11