Publication:

Experimental validation of full-field extreme ultraviolet lithography flare and shadowing corrections

Date

2008
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorMyers, Alan
dc.contributor.authorLorusso, Gian
dc.contributor.authorKim, In Sung
dc.contributor.authorGoethals, Mieke
dc.contributor.authorJonckheere, Rik
dc.contributor.authorHermans, Jan
dc.contributor.authorBaudemprez, Bart
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorHermans, Jan
dc.contributor.imecauthorBaudemprez, Bart
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecHermans, Jan::0000-0003-1249-8902
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-17T09:14:08Z
dc.date.available2021-10-17T09:14:08Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14204
dc.source.beginpage2215
dc.source.endpage2219
dc.source.issue6
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume26
dc.title

Experimental validation of full-field extreme ultraviolet lithography flare and shadowing corrections

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
16371.pdf
Size:
424.55 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles