Publication:

Excimer laser microvia-technology in multichip modules

Date

2003
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorManirambona, B.
dc.contributor.authorDe Baets, Johan
dc.contributor.authorVervaet, A.
dc.contributor.imecauthorDe Baets, Johan
dc.date.accessioned2021-10-15T05:34:49Z
dc.date.available2021-10-15T05:34:49Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7856
dc.source.beginpage171
dc.source.endpage176
dc.source.journalApplied Surface Science
dc.source.volume208-209
dc.title

Excimer laser microvia-technology in multichip modules

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
7348.pdf
Size:
523.42 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles