Publication:

Towards accurate temperature prediction in BEOL for reliability assessment (Invited)

Date

2023
Proceedings Paper
https://doi.org/10.1109/IRPS48203.2023.10117701
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dc.contributor.authorLofrano, Melina
dc.contributor.authorOprins, Herman
dc.contributor.authorChang, Xinyue
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorCherman, Vladimir
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCroes, Kristof
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorChang, Xinyue
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecChang, Xinyue::0000-0003-1875-6132
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecCherman, Vladimir::0000-0002-8068-9236
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.contributor.orcidimecLofrano, Melina::0000-0002-3930-6459
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.date.accessioned2024-01-09T16:20:12Z
dc.date.available2023-07-15T17:05:30Z
dc.date.available2023-08-07T11:56:11Z
dc.date.available2024-01-09T16:20:12Z
dc.date.issued2023
dc.identifier.doi10.1109/IRPS48203.2023.10117701
dc.identifier.eisbn978-1-6654-5672-2
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42151
dc.publisherIEEE
dc.source.conference61st IEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 26-30, 2023
dc.source.conferencelocationMonterey
dc.source.journalNA
dc.source.numberofpages7
dc.title

Towards accurate temperature prediction in BEOL for reliability assessment (Invited)

dc.typeProceedings paper
dspace.entity.typePublication
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