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Sputter yields and Ge migration in oxygen-bombarded SiGe
Publication:
Sputter yields and Ge migration in oxygen-bombarded SiGe
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Huyghebaert, Cedric
;
Brijs, Bert
;
Janssens, Tom
;
Vandervorst, Wilfried
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1813
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1813
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations