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Characterisation of ALCVD ZrO2 thin films by TEM
Publication:
Characterisation of ALCVD ZrO2 thin films by TEM
Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Richard, Olivier
;
Bender, Hugo
;
Houssa, Michel
;
Zhao, Chao
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1932
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1932
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations