Material aspects and challenges for SOI FinFET integration

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Author(s)

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Vellianitis, Georgios

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Doornbos, Gerben

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Duriez, Blandine

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Hikavyy, Andriy

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Vandeweyer, Tom

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Altamirano Sanchez, Efrain

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Rooyackers, Rita

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Witters, Liesbeth

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Collaert, Nadine

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Weemaes, R. G. R.

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1940 since deposited on 2021-10-17

Acq. date: 2025-10-23