Publication:

Ti/Co bilayers in salicide technology: electrical evaluation

Date

1995
Journal article
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dc.contributor.authorLauwers, Anne
dc.contributor.authorWang, Qingfeng
dc.contributor.authorDeweerdt, Bruno
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorDeweerdt, Bruno
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-09-29T13:08:57Z
dc.date.available2021-09-29T13:08:57Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/717
dc.source.beginpage12
dc.source.endpage18
dc.source.journalApplied Surface Science
dc.source.volume91
dc.title

Ti/Co bilayers in salicide technology: electrical evaluation

dc.typeJournal article
dspace.entity.typePublication
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