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Are extended defects a show stopper for future III-V CMOS technologies?

Date

2018-06
Proceedings Paper
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dc.contributor.authorClaeys, Cor
dc.contributor.authorHsu, Brent
dc.contributor.authorHe, Liang
dc.contributor.authorMols, Yves
dc.contributor.authorKunert, Bernardette
dc.contributor.authorLanger, Robert
dc.contributor.authorWaldron, Niamh
dc.contributor.authorEneman, Geert
dc.contributor.authorCollaert, Nadine
dc.contributor.authorHeyns, Marc
dc.contributor.authorSimoen, Eddy
dc.contributor.imecauthorHsu, Brent
dc.contributor.imecauthorMols, Yves
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecHsu, Brent::0000-0003-0823-6088
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-25T17:20:49Z
dc.date.available2021-10-25T17:20:49Z
dc.date.issued2018-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30440
dc.source.conference19th International Conference on Extended Defects in Semiconductors - EDS
dc.source.conferencedate24/06/2018
dc.source.conferencelocationThessaloniki Greece
dc.title

Are extended defects a show stopper for future III-V CMOS technologies?

dc.typeProceedings paper
dspace.entity.typePublication
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