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Stacked nanosheet fork architecture for SRAM design and device co-optimization toward 3nm

Date

2017
Proceedings Paper
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dc.contributor.authorWeckx, Pieter
dc.contributor.authorRyckaert, Julien
dc.contributor.authorPutcha, Vamsi
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorJang, Doyoung
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMocuta, Anda
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorPutcha, Vamsi
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecPutcha, Vamsi::0000-0003-1907-5486
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-24T18:44:57Z
dc.date.available2021-10-24T18:44:57Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29917
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8268430/
dc.source.beginpage505
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate2/12/2017
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage508
dc.title

Stacked nanosheet fork architecture for SRAM design and device co-optimization toward 3nm

dc.typeProceedings paper
dspace.entity.typePublication
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