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Hybrid fixed abrasive CMP for 65 nm STI integration, FinFet structures and other advanced applications
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1844 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
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Views
1844 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
Citations