Publication:
Integration and electrical characterization of carbon nanotubes bundles for application as vertical interconnects
Date
| dc.contributor.author | Chiodarelli, Nicolo | |
| dc.contributor.author | Arstila, Kai | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Vereecken, Philippe | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | Vereecken, Philippe | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
| dc.date.accessioned | 2021-10-18T15:34:16Z | |
| dc.date.available | 2021-10-18T15:34:16Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16860 | |
| dc.source.conference | Eurocarbon Symposium | |
| dc.source.conferencedate | 13/07/2010 | |
| dc.source.conferencelocation | Aachen Germany | |
| dc.title | Integration and electrical characterization of carbon nanotubes bundles for application as vertical interconnects | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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