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Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction technique
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Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction technique
Date
2007
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rehman Khan, Aaliya
;
Stangl, J.
;
Bauer, G.
;
Buca, D.
;
Holländer, B.
;
Trinkhaus, H.
;
Mantl, S.
;
Loo, Roger
;
Caymax, Matty
Journal
Semiconductor Science and Technology
Abstract
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1891
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1891
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations