Publication:
Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction technique
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1899 since deposited on 2021-10-16
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Acq. date: 2026-10-06
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1899 since deposited on 2021-10-16
4last month
3last week
Acq. date: 2026-10-06
Citations