Publication:

Evaluation of backside passivation using laser annealing in backside illuminated image sensors

Date

2013
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28697.pdf 1.84 MB

Author(s)

Minoglou, Kiki
;
De Munck, Koen  
;
Malachowski, Karl
;
Sabuncuoglu Tezcan, Deniz  
;
Everaert, Jean-Luc
;
Haspeslagh, Luc  
;
Mazzamuto, Fulvio
;
Toqué-Trésonne, Ines
;
Huet, Karim
;
De Moor, Piet  

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