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Towards the 3D thin-film Li-ion battery: A novel solution-based process for the deposition of (multi-) metal oxide coatings on high aspect ratio features

Date

2015
Meeting abstract
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dc.contributor.authorGielis, Sven
dc.contributor.authorPeys, Nick
dc.contributor.authorMoitzheim, Sebastien
dc.contributor.authorVereecken, Philippe
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.accessioned2021-10-22T19:25:08Z
dc.date.available2021-10-22T19:25:08Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25316
dc.source.beginpage17
dc.source.conference228th ECS Meeting
dc.source.conferencedate11/10/2015
dc.source.conferencelocationPhoenix, AZ USA
dc.title

Towards the 3D thin-film Li-ion battery: A novel solution-based process for the deposition of (multi-) metal oxide coatings on high aspect ratio features

dc.typeMeeting abstract
dspace.entity.typePublication
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