Publication:
Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Alvarez, David | |
| dc.contributor.author | Fouchier, Marc | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.date.accessioned | 2021-10-15T17:23:55Z | |
| dc.date.available | 2021-10-15T17:23:55Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9822 | |
| dc.source.conference | MRS Fall Meeting Symposium O: Scanning-Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials | |
| dc.source.conferencedate | 29/11/2004 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.title | Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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