Publication:
Selective airgaps: towards a scalable lowk solution
Date
| dc.contributor.author | Gueneau de Mussy, Jean Paul | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T01:51:10Z | |
| dc.date.available | 2021-10-16T01:51:10Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10532 | |
| dc.source.beginpage | 77 | |
| dc.source.book | Materials for Information Technology: Devices, Interconnects and Packaging | |
| dc.source.endpage | 84 | |
| dc.title | Selective airgaps: towards a scalable lowk solution | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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