Publication:
MEMS processing and integration
Date
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.date.accessioned | 2021-10-17T22:45:16Z | |
| dc.date.available | 2021-10-17T22:45:16Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15443 | |
| dc.source.conference | 35th Iternational Conference on Micro- and Nano Engineering - MNE | |
| dc.source.conferencedate | 28/09/2009 | |
| dc.source.conferencelocation | Gent Belgium | |
| dc.title | MEMS processing and integration | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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