Publication:

Comparison of directed self-assembly integrations

Date

2012
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSomervell, Mark
dc.contributor.authorGronheid, Roel
dc.contributor.authorHooge, Joshua
dc.contributor.authorNafus, Kathleen
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorThode, Chris
dc.contributor.authorYounkin, Todd
dc.contributor.authorMatsunaga, Koichi
dc.contributor.authorRathsack, Ben
dc.contributor.authorScheer, Steven
dc.contributor.authorNealy, Paul
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorScheer, Steven
dc.date.accessioned2021-10-20T16:17:01Z
dc.date.available2021-10-20T16:17:01Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21528
dc.source.beginpage83250G
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXIX
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
dc.title

Comparison of directed self-assembly integrations

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
24710.pdf
Size:
2.19 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions